1 Click Subscribe to the RSS feed
1 click ADD to your Google Homepagethe Bibles - References for Microfabrication
Thin Film Processes by Vossen and Kern
( especially Ch 6 Wet Etchants table by Deckker and Kern )
BTL Silicon Technology
Handbook of Chemistry and Physics
Ed Graper's ( Lebow Inc / TFI Telemark )
Table of Thin Film Evaporation - materials and properties
Dan Flamm's text on Plasma and RIE Etching
wendman nanotechnology nanotech nano mems thin films plasma+etch oxidation LPCVD CVD pecvd photolithography Noyce photoresist
ion+implantation
( especially Ch 6 Wet Etchants table by Deckker and Kern )
BTL Silicon Technology
Handbook of Chemistry and Physics
Ed Graper's ( Lebow Inc / TFI Telemark )
Table of Thin Film Evaporation - materials and properties
Dan Flamm's text on Plasma and RIE Etching
wendman nanotechnology nanotech nano mems thin films plasma+etch oxidation LPCVD CVD pecvd photolithography Noyce photoresist
ion+implantation
posted by Mark Wendman at 7:30 AM
0 Comments:
Post a Comment
<< Home