Thursday, December 15, 2005

the Bibles - References for Microfabrication

Thin Film Processes by Vossen and Kern
( especially Ch 6 Wet Etchants table by Deckker and Kern )
BTL Silicon Technology
Handbook of Chemistry and Physics

Ed Graper's ( Lebow Inc / TFI Telemark )
Table of Thin Film Evaporation - materials and properties

Dan Flamm's text on Plasma and RIE Etching


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